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地球温暖化係数（GWP）が二酸化炭素に比べて非常に大きいことから，排出量削減の必要性が指摘されているPFC's及びNF3，SF6ガスについて，電子デバイス製造プロセスからの実排出量をモニタリングするための高感度かつ高精度の測定技術を確立した。この技術の確立により，効率的な削減対策が推進できるようになる。当該技術は，コールドトラップ法を応用した低沸点PFC's（CF4，CHF3，C2F6）及びNF3，SF6混合ガスの高効率で再現性の良い濃縮手法とオンカラムでのクライオフォーカス及びオリジナルPLOTカラムを用いた濃縮混合ガスの成分分離を特徴とする。定量分析においては，0.1ppbから最大1000ppbまでの濃度域で相関係数0.99以上の精度で検量線が得られ，pptからppmレベルの広濃度域での定量が可能であることを確認した。
Recent research, citing global warming potentials (GWP) that greatly exceed that of carbon dioxide, has pointed out the need for reducing the emission of PFC's and other gases, such as NF3 and SF6. In response, we have established an ultra-sensitive, highly precise measurement technology to monitor these levels at the production site of electronic devices. This system makes it possible to compile up effective measures to reduce the emission of those substances.
The technology features a highly efficient and repeatable concentration technique which applies the cold-trap method to composite gases with a low boiling point: PFC's (e.g., CF4, CHF3, and C2F6), NF3 and SF6. It also features the separation of the composite gases into their components using on-column cryofocus and an original PLOT column.
Quantitative analyses confirmed that, in a range from 0.1 ppb to 1000 ppb, this method was able to establish a calibration curve with a correlative coefficient above 0.99, and that it was also able to measure concentration levels over a wide range, from parts per million to parts per trillion.
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